The piezoelectric effect enables the conversion between electrical energy and mechanical energy. Benefitting from the stable fabrication techniques and excellent properties of the piezoelectric thin-film materials, integrated optoelectronic chips based on the piezoelectric effect have been widely studied and are expected to be applied in large-scale integrated chips. In this paper, we first introduce the research progress of commonly used piezoelectric thin-film materials, then we review and discuss the integrated optoelectronic devices based on piezo-optomechanical actuators. By the principles of the piezoelectric effect, the applied electric field can drive the macroscopic deformation of the material with ultra-low power consumption. Furthermore, we provide a brief overview and prospects of low-power piezo-optomechanically tuning devices and acousto-optic modulators for their large-scale integration and application. With the development of silicon-based optoelectronics technology and piezoelectric thin-film material, integrated optoelectronic chips based on piezo-optomechanical actuator will offer significant value and find wide-range applications.
